Title :
UV-LIGA Micro-Fabrication of Inertia Type Electrostatic Transducers and Their Application
Author :
Elizabeth J. Podlaha-Murphy استاد مشاور , Marcio S. de Queiroz استاد مشاور , Wanjun Wang استاد راهنما
University :
Lovisiana State University
Major :
Doctor of Philosophy )Ph.D.( )Mechanical Engineering(
Keyword :
relay , inertia sensor , spring , ANSYS , functional material
