• DocumentCode
    17596
  • Title

    Surface Micromachined Peristaltic Pumps Using Lead Zirconate Titanate Film

  • Author

    Srinivas Tadigadapa استاد مشاور , Clive A. Randall استاد مشاور , Susan Trolier-McKinstry استاد راهنما

  • University
    Pennsylvania State University
  • Grade
    نامعلوم
  • Major
    PhD )Dissertation(
  • Number of pages
    0
  • Publish Date
    2003
  • Keyword

    interdigitated electrode , diaphragm actuator , micropump , PZT , MEMS , surface micromachining

  • Note
    01
  • Language
    انگليسي