DocumentCode
17596
Title
Surface Micromachined Peristaltic Pumps Using Lead Zirconate Titanate Film
Author
Srinivas Tadigadapa استاد مشاور , Clive A. Randall استاد مشاور , Susan Trolier-McKinstry استاد راهنما
University
Pennsylvania State University
Grade
نامعلوم
Major
PhD )Dissertation(
Number of pages
0
Publish Date
2003
Keyword
interdigitated electrode , diaphragm actuator , micropump , PZT , MEMS , surface micromachining
Note
01
Language
انگليسي
Link To Document