Title :
Study of Thin Silicon Oxides and High-K Materials for Gate Dielectrics in Metal-Insulator-Si Structures
Author :
Osama O. Awadelkarim استاد راهنما , Mark W. Horn استاد مشاور , S. Ashok استاد مشاور
University :
Pennsylvania State University
Major :
PhD )Dissertation(
Keyword :
thin oxide , high k , Gate dielectrics , characterization
