Title :
Nano-structured PECVD Silicon Films and Their Device Applications
Author :
Russell Messier استاد مشاور , Stephen J. Fonash استاد راهنما , Jian Xu استاد مشاور
University :
Pennsylvania State University
Major :
PhD )Engineering Science and Mechanics(
Keyword :
poly-crystalline silicon , Thin film transistor , Humidity sensor , nano-crystalline silicon
