DocumentCode
1871
Title
New Formulation for Finite Element Modeling Electrostatically Driven Microelectromechanical Systems
Author
O. Onipede استاد مشاور , D. Ostergaard استاد مشاور , M. Lovell استاد راهنما
University
university of pittsburgh
Grade
دكتري
Major
Doctor of Philosophy
Number of pages
0
Publish Date
2003
Keyword
Design , transducer , coupled field , MEMS , FEA
Note
01
Language
انگليسي
Link To Document