Title :
A New Approach to Evaluate Fracture Strength of UV-LIGA Fabricated Nickel Specimens
Author :
Michael C. Murphy استاد مشاور , Elizabeth J. Podlaha-Murphy استاد مشاور , Wanjun Wang استاد راهنما
University :
Lovisiana State University
Major :
Master of Science in Mechanical Engineering )M.S.M.E.( )Mechanical Engineering(
Keyword :
electrochemical deposition , negative photoresist , microsystems , copper etching , SU-8