• DocumentCode
    18882
  • Title

    Silicon oxidation by atomic and molecular oxygen

  • Author

    Jean R. Blachere استاد مشاور , Judith C. Yang استاد راهنما

  • University
    university of pittsburgh
  • Grade
    نامعلوم
  • Major
    Master of Science in Materials Science and Engineering )Materials Science and Engineering(
  • Number of pages
    0
  • Publish Date
    2004
  • Keyword

    silicon single-crystal , LEO , eels , AFM , HRTEM , 5eV atomic oxygen , SAED , RBS , XPS

  • Note
    01
  • Language
    انگليسي