DocumentCode :
19170
Title :
Design of Piezoresistive MEMS Force and Displacement Sensors
University :
Brighan Young University Browse
Grade :
نامعلوم
Major :
PhD )Mechanical Engineering(
Number of pages :
0
Publish Date :
2006
Keyword :
INTEGRAL , Compliant Mechanisms , microactuator , thermal , complex loads , POLYSILICON , piezoresistance , characterization , MEMS , Force , DISPLACEMENT
Note :
01
Language :
انگليسي
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=17&DC=19170
