19198

Analysis and Design of Surface Micromachined Micromanipulators for Out-of-Plane Micropositioning

Brighan Young University Browse

نامعلوم

PhD )Mechanical Engineering(

0

2003

out-of-plane , surface micromachining , thermal actuation , TIM , MEMS , Microelectromechanical systems , micropositioning , Compliant Mechanisms , ortho-planar , thermomechanical in-plane microactuator

01

انگليسي