DocumentCode :
19301
Title :
Analysis and preliminary characterization of a MEMS cantilever-type chemical sensor
Author :
Cosme Furlong استاد مشاور , Ryszard Pryputniewicz استاد راهنما
University :
WPI
Grade :
نامعلوم
Major :
MS )Mechanical Engineering(
Number of pages :
0
Publish Date :
2003
Keyword :
resonance , Chemical , Cantilever , MEMS , Polymer , micromechanical , ABSORPTION , AFM , SEM , Holography , optoelectronic , Frequency , Hydrogen , Vibration , PALLADIUM , vibrometry , detection , Silicon
Note :
01
Language :
انگليسي
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=17&DC=19301
