DocumentCode
20141
Title
Development of MEMS Sensors for Measurements of Pressure, Relative Humidity, and Temperature
Author
J. Blandino استاد مشاور , R. J. Pryputniewicz استاد راهنما
University
WPI
Grade
نامعلوم
Major
ME )Mechanical Engineering(
Number of pages
0
Publish Date
2003
Keyword
MEMS , Pressure , Relative humidity , Temperature
Note
01
Language
انگليسي
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