• DocumentCode
    20141
  • Title

    Development of MEMS Sensors for Measurements of Pressure, Relative Humidity, and Temperature

  • Author

    J. Blandino استاد مشاور , R. J. Pryputniewicz استاد راهنما

  • University
    WPI
  • Grade
    نامعلوم
  • Major
    ME )Mechanical Engineering(
  • Number of pages
    0
  • Publish Date
    2003
  • Keyword

    MEMS , Pressure , Relative humidity , Temperature

  • Note
    01
  • Language
    انگليسي