DocumentCode :
2020
Title :
Fabrication and characterization of AlN thin film bulk acoustic wave resonator
Author :
Qing-Ming Wang استاد راهنما , John A. Barnard استاد مشاور , Patrick Smolinski استاد مشاور
University :
university of pittsburgh
Grade :
دكتري
Major :
Doctor of Philosophy
Number of pages :
0
Publish Date :
2006
Keyword :
Thin film , BAW resonator , Piezoelectricity , RF filter
Note :
01
Language :
انگليسي
Link To Document :
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