مرکز منطقه ای اطلاع رساني علوم و فناوري - Development of a modular interferometric microscopy system for characterization of MEMS

DocumentCode :

20542

Title :

Development of a modular interferometric microscopy system for characterization of MEMS

Author :

Ryszard J. Pryputniewicz استاد راهنما , Nancy A. Burnham استاد مشاور

University :

WPI

Grade :

نامعلوم

Major :

MS )Mechanical Engineering(

Number of pages :

Publish Date :

2007

Keyword :

Vacuum , shape and deformation measurement , MEMS , scanning white light , Interferometry , Vibration , vibrometry , thermal

Note :

Language :

انگليسي

Link To Document :