DocumentCode :
20670
Title :
Phase modulating interferometry with stroboscopic illumination for characterization of MEMS
Author :
Cosme Furlong استاد راهنما , Rysard Pryputniewicz استاد مشاور
University :
WPI
Grade :
نامعلوم
Major :
ME )Mechanical Engineering(
Number of pages :
0
Publish Date :
2006
Keyword :
MEMS characterization , stroboscopic illumination , Interferometry , phase modulation
Note :
01
Language :
انگليسي
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=17&DC=20670
