Title :
Analysis of High-k Dielectric Thin Films with Time-of-Flight Medium Energy Backscattering
Author :
Bridget Rogers استاد راهنما , G. Kane Jennings استاد مشاور , Robert Weller استاد مشاور
University :
Vanderbilt University
Major :
PhD )Chemical Engineering(
Keyword :
high permittivity , backscattering spectrometry , depth resolution , interfacial analysis
