Title :
Thermal Metrology of Polysilicon MEMS using Raman Spectroscopy
Author :
Sean P. Kearney استاد مشاور , Zhuomin Zhang استاد مشاور , Samuel Graham استاد راهنما
University :
Georgia University Of Technology
Major :
Master of Science )Mechanical Engineering(
Keyword :
thermal MEMS , microscale thermometry , POLYSILICON , Raman spectroscopy
