DocumentCode
23458
Title
Control of stress in silicon nitride thin films
Author
Cornely Roy H. استاد راهنما , Sohn Kenneth استاد مشاور
University
Van Houten Library )new Jersey Institute Of Technology(
Grade
نامعلوم
Major
Master of Science )Electrical Engineering(
Number of pages
0
Publish Date
1990
Keyword
Silicon nitride , Thin films , Sputtering )Physics(
Note
01
Language
انگليسي
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