Title :
Investigation of optical properties of InP, AIN and Sapphire for applications in non-contact semiconductor process monitoring
Author :
Cornely Roy H. استاد مشاور , Ravindra N. M. استاد راهنما
University :
Van Houten Library )new Jersey Institute Of Technology(
Major :
Master of Science )Electrical and Computer Engineering(
Keyword :
Rapid thermal processing , Radiation pyrometers , Infrared Technology , Semiconductors
