Title :
Determination of phase composition of sputtered tantalum on steel substrates by resistivity measurements
Author :
Sosnowski Marek استاد راهنما , Misra Durgamadhab استاد مشاور
University :
Van Houten Library )new Jersey Institute Of Technology(
Major :
Master of Science )Electrical Engineering(
Keyword :
Tantalum films , Steel substrates
