• DocumentCode
    23597
  • Title

    Formation and characterization of n/p shallow junctions in sub-micron MOSFETs

  • Author

    Fiory Anthony استاد مشاور , Ravindra N. M. استاد راهنما

  • University
    Van Houten Library )new Jersey Institute Of Technology(
  • Grade
    نامعلوم
  • Major
    Master of Science )Materials Science and Engineering(
  • Number of pages
    0
  • Publish Date
    2002
  • Keyword

    Semiconductors , Leakage Current

  • Note
    01
  • Language
    انگليسي