• DocumentCode
    23648
  • Title

    Ortho-Planar Mechanisms for Microelectromechanical Systems

  • University
    Brigham young University
  • Grade
    نامعلوم
  • Major
    Mechanical Engineering
  • Number of pages
    0
  • Publish Date
    2005
  • Keyword

    MEMS , ortho-planar , out-of-plane , POP-UP , design space

  • Note
    01
  • Language
    انگليسي