DocumentCode :
23761
Title :
Piezoresistive Sensing of Bistable Micro Mechansim State
University :
Mechanical Engineering
Grade :
نامعلوم
Number of pages :
0
Publish Date :
2005
Keyword :
bistable , Mechanism , Micro , POLYSILICON , piezoresistive , piezo , sensing , piezoresistivity , MEMS , State , compliant
Note :
01
Language :
انگليسي
Link To Document :
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