Title :
Formation characterization of p/n shallow junctions in sub-micron MOSFETs
Author :
Fiory Anthony استاد مشاور , Ravindra N. M. استاد راهنما , Ivanov Dentcho V استاد مشاور
University :
Van Houten Library )new Jersey Institute Of Technology(
Major :
Master of Science )Materials Science and Engineering(
Keyword :
Sub-micron MOSFETs , Shallow junctions , Complementary metal oxide semiconductors )CMOS(
