DocumentCode
23916
Title
On-Chip Actuation of Compliant Bistable Micro-Mechanisms
University
Brigham young University
Grade
نامعلوم
Major
Mechanical Engineering
Number of pages
0
Publish Date
2003
Keyword
Compliant Mechanism , bistable , MEMS , Micro , thermal actuator
Note
01
Language
انگليسي
Link To Document