Title :
An investigation of electrical and optical properties of reactively sputtered silicon nitride and amorphous hydrogenated silicon thin films
Author :
Cornely Roy H. استاد مشاور , Sohn Kenneth استاد راهنما
University :
Van Houten Library )new Jersey Institute Of Technology(
Major :
Master of Science )Electrical Engineering(
Keyword :
Thin films --Electric properties. , Thin films --Optical properties , Sputtering )Physics(.
