مرکز منطقه ای اطلاع رساني علوم و فناوري - Modeling and Control of Surface Micromachined Thermal Actuators

DocumentCode :

24061

Title :

Modeling and Control of Surface Micromachined Thermal Actuators

University :

Brigham young University

Grade :

نامعلوم

Major :

Mechanical Engineering

Number of pages :

Publish Date :

2004

Keyword :

MEMS , feedback control , FEA , piezoresistivity , response time , Finite element , TIM , thermal actuator

Note :

Language :

انگليسي

Link To Document :