DocumentCode
24153
Title
Plasma enhanced chemical vapor deposition of diamondlike carbon films using acetylene
Author
Levy Roland A. استاد راهنما , Tyson Trevor استاد مشاور , Ravindra N. M. استاد مشاور
University
Van Houten Library )new Jersey Institute Of Technology(
Grade
نامعلوم
Major
Master of Science )Interdisciplinary Program in Materials Science and Engineering(
Number of pages
0
Publish Date
1998
Keyword
Plasma-etching chemical vapor deposition , Diamond thin films
Note
01
Language
انگليسي
Link To Document