Title :
Plasma enhanced chemical vapor deposition of diamondlike carbon films using acetylene
Author :
Levy Roland A. استاد راهنما , Tyson Trevor استاد مشاور , Ravindra N. M. استاد مشاور
University :
Van Houten Library )new Jersey Institute Of Technology(
Major :
Master of Science )Interdisciplinary Program in Materials Science and Engineering(
Keyword :
Plasma-etching chemical vapor deposition , Diamond thin films
