DocumentCode :
24182
Title :
Thermal Microactuators for Microelectromechanical Systems )MEMS
University :
Brigham young University
Grade :
نامعلوم
Number of pages :
0
Publish Date :
2003
Keyword :
microactuator , themomechanical inplane micromechanisms , Thermal expansion , thermal expansion device , thermal actuator , Microelectromechanical systems , compliant micromechanism compliant mechanism , MEMS
Note :
01
Language :
انگليسي
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=17&DC=24182
