DocumentCode :
25091
Title :
NANOLITHOGRAPHY ON THIN FILMS USING HEATED ATOMIC FORCE MICROSCOPE CANTILEVERS
Author :
Gall Ken استاد مشاور , Henderson Clifford استاد مشاور , King William Paul استاد راهنما
University :
Georgia Institute Of Technology
Grade :
نامعلوم
Major :
Master of Science
Number of pages :
0
Publish Date :
2006
Keyword :
characterization , deflection , setpoint , grain rearrangement , array , precise positioning , Metrology , explosion , Explosives , data storage , MATERIAL , image processing , slow scan disabled , Temperature , TIP , Local , in-situ , nanoscale , electrical circuit fabrication , Repair , co-polycarbonate , Polymer , polycarbonate , energetic material. pentaerythritol tetranitrate , PETN , SIMULATION , Interface , Nano-manufacturing , Experiment , Calibration , Raman , Frequency , deflagration , decomposition , Detonation , buildup , pile-up , end capped , end capping , cross linked , cross-inked , Conductivity , microscale , MEMS , microcantilever , NEMS , DPN , tDPN , Silicon , PEAK , InVOLS , manipulation , AFM , Atomic Force Microscope , defense , nanoscale , surface , Stiffness , Force , scan size , thermal cantilevers , imagin , Lithography , nanolithography , Thin films , cantilevers , heaters , technology , NANOTECHNOLOGY , scan velocity , scan rate , bake , anneal
Note :
01
Language :
انگليسي
Link To Document :
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