DocumentCode :
26315
Title :
Theoretical and Numerical Studies of the Air Damping of Micro-Resonators in the Non-Continuum Regime
Author :
Ayazi Farrokh استاد مشاور
University :
Georgia Institute Of Technology
Grade :
نامعلوم
Major :
Master of Science
Number of pages :
0
Publish Date :
2004
Keyword :
Quality factor , Resonator , MEMS , air damping
Note :
01
Language :
انگليسي
Link To Document :
بازگشت