Title :
Intrinsic Stress and High Temperature Properties of Metal-Containing Hydrogenated Amorphous Carbon Coatings
Author :
Wen Jin Meng استاد راهنما , Kevin W. Kelly استاد مشاور , Michael M Khonsari استاد مشاور
University :
Lovisiana State University
Major :
Doctor of Philosophy )Ph.D.( )Mechanical Engineering(
Keyword :
Titanium , intrinsic stress , Amorphous carbon , chemical vapor deposition