مرکز منطقه ای اطلاع رساني علوم و فناوري - Nanostructured Origami )TM( : folding thin films out of the plane of a silicon wafer with highly stressed chromium hinges

DocumentCode :

29997

Title :

Nanostructured Origami )TM( : folding thin films out of the plane of a silicon wafer with highly stressed chromium hinges

Author :

George Barbastathis and Henry I. Smith. استاد راهنما

University :

DSpace MIT Libraries

Grade :

نامعلوم

Major :

Thesis )M. Eng.(

Number of pages :

Publish Date :

2005

Keyword :

Electrical Engineering and Computer Science

Note :

Language :

انگليسي

Link To Document :