DocumentCode
3134
Title
Ultrathin silicon wafer bonding physics and applications
Author
Digges Thomas G. استاد مشاور , Farmer Kenneth Rudolph استاد راهنما
University
Van Houten Library )new Jersey Institute Of Technology(
Grade
دكتري
Major
Doctor of Philosophy )Applied Physics(
Number of pages
0
Publish Date
2001
Keyword
Ultrathin Silicon Wafer Bonding , Manufacture Of Microelectomechanical Systems )MEMS( Devices , Power Spectral Density )PSD(
Note
01
Language
انگليسي
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