DocumentCode
3159
Title
Measuring Acid Generation Kinetics in Photoresist Films via Capacitance Techniques
Author
Henderson Clifford استاد راهنما , Byers Jeffrey استاد مشاور , Hess Dennis استاد مشاور
University
Georgia University Of Technology
Grade
دكتري
Major
Doctor of Philosophy )Chemical Engineering(
Number of pages
0
Publish Date
2004
Keyword
interdigitated electrodes , capacitance , Dill C , photoresist
Note
01
Language
انگليسي
Link To Document