Title :
Measuring Acid Generation Kinetics in Photoresist Films via Capacitance Techniques
Author :
Henderson Clifford استاد راهنما , Byers Jeffrey استاد مشاور , Hess Dennis استاد مشاور
University :
Georgia University Of Technology
Major :
Doctor of Philosophy )Chemical Engineering(
Keyword :
interdigitated electrodes , capacitance , Dill C , photoresist
