Title :
Calibration of a microvision system for MEMS device characterization Calibration of a microvision system for microelectromechanical system device characterization
Author :
Stephen D. Senturia. استاد راهنما
University :
DSpace MIT Libraries
Major :
Thesis )M.Eng.( )Massachusetts Institute of Technology, Dept.(
Keyword :
Electrical Engineering and Computer Science
