Title :
A micromachined thermo-optical light modulator based on semiconductor-to-metal phase transition
Author :
Chin Ken K. استاد مشاور , Carr William N. استاد راهنما
University :
Van Houten Library )new Jersey Institute Of Technology(
Major :
Doctor of Philosophy )Materials Science and Engineering(
Keyword :
Light modulator , Micromachining , phase transition , MEMS , Thermo-optical , Vanadium dioxide