Title :
Low energy implantation of boron with decaborane ions
Author :
Chin Ken K. استاد راهنما , Farmer Kenneth Rudolph استاد مشاور , Jacobson Dale C. استاد مشاور
University :
Van Houten Library )new Jersy Institute Of Technology(
Major :
Doctor of Philosophy )Materials Science and Engineering(
Keyword :
boron , Decaborane Ions , Si MOS Devices
