Title :
Mechanisms of layer-transfer related to silicon-on-insulator structures
Author :
Carr William N. استاد راهنما , Usenko Alexander Y. استاد مشاور , Chabal Yves Jean استاد مشاور
University :
Van Houten Library )new Jersey Institute Of Technology(
Major :
Doctor of Philosophy )Materials Science and Engineering(
Keyword :
Plasma processing , Silicon-on-insulator , Wafer bonding , Hydrogenation , Layer exfoliation
