• DocumentCode
    3520
  • Title

    The feasibility of micromachined dynamic resonant beam coriolis true mass flow meter

  • Author

    Khusid Boris استاد مشاور , Chin Ken K. استاد راهنما

  • University
    Van Houten Library )new Jersey Institute Of Technology(
  • Grade
    دكتري
  • Major
    Doctor of Philosophy )Materials Science and Engineering(
  • Number of pages
    0
  • Publish Date
    2005
  • Keyword

    Gloss etching , Resonant beam , Mass flow meter , Coriolis force , Deep reactive ion etching , Wafer bonding

  • Note
    01
  • Language
    انگليسي