DocumentCode
3520
Title
The feasibility of micromachined dynamic resonant beam coriolis true mass flow meter
Author
Khusid Boris استاد مشاور , Chin Ken K. استاد راهنما
University
Van Houten Library )new Jersey Institute Of Technology(
Grade
دكتري
Major
Doctor of Philosophy )Materials Science and Engineering(
Number of pages
0
Publish Date
2005
Keyword
Gloss etching , Resonant beam , Mass flow meter , Coriolis force , Deep reactive ion etching , Wafer bonding
Note
01
Language
انگليسي
Link To Document