Title :
The feasibility of micromachined dynamic resonant beam coriolis true mass flow meter
Author :
Khusid Boris استاد مشاور , Chin Ken K. استاد راهنما
University :
Van Houten Library )new Jersey Institute Of Technology(
Major :
Doctor of Philosophy )Materials Science and Engineering(
Keyword :
Gloss etching , Resonant beam , Mass flow meter , Coriolis force , Deep reactive ion etching , Wafer bonding
