Title :
Deposition and characterization of magnetron sputtered BCC tantalum
Author :
Sosnowski Marek استاد راهنما , Cornely Roy H. استاد مشاور
University :
Van Houten Library )new Jersey Institute Of Technology(
Major :
Doctor of Philosophy )Department of Electrical and Computer Engineering(
Keyword :
tantalum , sputtering , BCC phase , Beta phase , Tantalum nitride
