Title :
Optimization studies of thermal bimorph cantilevers, electrostatic torsion actuators and variable capacitors
Author :
Misra Durgamadhab استاد مشاور , Farmer Kenneth Rudolph استاد راهنما
University :
Van Houten Library )new Jersey Institute Of Technology(
Major :
Doctor of Philosophy )Committee for the Interdisciplinary Program in Materials Science and Engineering(
Keyword :
MEMS , Electrostatic torsion actuators , Bimorph cantilevers , Variable capacitors
