Title :
Micromachined Broadband Acoustic Transducers with Integrated Optical Displacement Detection
Author :
Allen Mark H. استاد مشاور , Degertekin Levent استاد راهنما , Berthelot Yves استاد مشاور
University :
Georgia Institute Of Technology
Major :
Doctor of Philosophy
Keyword :
cMUTs , thermal noise , laser noise , RESOLUTION
