DocumentCode :
4049
Title :
Miniaturized Diffraction Based Interferometric Distance Measurement Sensor
Author :
Kurfess Thomas استاد مشاور , Degertekin F. Levent استاد راهنما
University :
Georgia Institute Of Technology
Grade :
دكتري
Major :
Doctor of Philosophy
Number of pages :
0
Publish Date :
2004
Keyword :
Scanning , MEMS , Interferometer , Metrology
Note :
01
Language :
انگليسي
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=17&DC=4049
