4179

Real-time malfunction diagnosis and prognosis of reactive ion etching using neural networks

Gary S. May استاد راهنما

Georgia Institute Of Technology

دكتري

Doctor of Philosophy

0

2003

Real-time Control , Semicondcutors Etching Defects , Semiconductor wafers Defects , Semiconductors Failures , Semiconductors Defects , Antimony Environmental aspects

01

انگليسي