Title :
Vapor Phase Lubrication of MicroElectro Mechanical Systems )MEMS(: An atomistic approach to solve friction and stiction in MEMS
Author :
Jacqueline Krim استاد راهنما
University :
Virginia Polytechnic Institute and state University
Major :
Master of Science )Electrical Engineering(
Keyword :
MEMS , Vapor , Lubrication , Stiction , Friction
