مرکز منطقه ای اطلاع رساني علوم و فناوري - Development of Techniques to Quantify Chemical and Mechanical Modifications of Polymer Surfaces: Application to Chemical Mechanical Polishing

DocumentCode :

4248

Title :

Development of Techniques to Quantify Chemical and Mechanical Modifications of Polymer Surfaces: Application to Chemical Mechanical Polishing

Author :

MORRIS JEFFREY F. استاد مشاور , Hess Dennis W. استاد راهنما

University :

Georgia Institute Of Technology

Grade :

دكتري

Major :

Doctor of Philosophy

Number of pages :

Publish Date :

2004

Keyword :

chemical mechanical polishing , Depth profile , Polymer , Optical properties , angle resolved XPS

Note :

Language :

انگليسي

Link To Document :