DocumentCode
4419
Title
Diffraction-based integrated optical readout for micromachined optomechanical sensors
Author
F. Levent Degertekin استاد راهنما , David S. Citrin استاد مشاور , Paul E. Hasler استاد مشاور
University
Georgia Institute Of Technology
Grade
دكتري
Major
Doctor of Philosophy
Number of pages
0
Publish Date
2006
Keyword
Microelectromechanical systems )MEMS(
Note
01
Language
انگليسي
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