DocumentCode
6083
Title
Nonlinear devices characterization and micromachining techniques for RF integrated circuits
Author
Flandre Denis استاد مشاور , Cerdeira Antonio استاد راهنما
University
UCL )Les Bibliotheques de L,Universite Catholique de Louvain(
Grade
دكتري
Major
FSA 3 - Doctorat en sciences appliquees
Number of pages
0
Publish Date
2004
Keyword
Capillarity , intermodulation , surface micromachining , Silanes , Dry etching , SOI , Release , POLYSILICON , plasma etching , Hydrophobicity , LNA , low-noise amplifier , IFM , RIE , STRESS , ICP
Note
01
Language
انگليسي
Link To Document