Title :
Thermal Stability of Transistion Metal Nitrides as NMOS Gate Electrodes
Author :
Gerald Lucovsky استاد مشاور , Dennis Maher استاد مشاور , Jon - paul Maria استاد مشاور , Veena Misra استاد راهنما
University :
Raleigh North carolina state university
Major :
PhD )Materials Science and Engineering(
Keyword :
metal gate electrode tantalum nitride
