Title :
Design and Fabrication of a MEMS Pressure Sensor and Developing a Release Protocol for MEMS. by kaustubh Ramesh Bhate A thesis Submitted to the Graduate Faculty of North Carolina state University in partial fulfillment of the requirements f
Author :
Paul D. Franzon استاد راهنما
University :
Releigh North Carolina state University
Major :
Master of Science )Electrical Engineering(
Keyword :
mems release pressure sensor stictiopn
