DocumentCode
8722
Title
Design and Fabrication of a MEMS Pressure Sensor and Developing a Release Protocol for MEMS. by kaustubh Ramesh Bhate A thesis Submitted to the Graduate Faculty of North Carolina state University in partial fulfillment of the requirements f
Author
Paul D. Franzon استاد راهنما
University
Releigh North Carolina state University
Grade
نامعلوم
Major
Master of Science )Electrical Engineering(
Number of pages
0
Publish Date
2002
Keyword
mems release pressure sensor stictiopn
Note
01
Language
انگليسي
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